The Villo OHT Overhead Track Cleaning System is designed for continuous dust removal from overhead hoist transport (OHT) tracks in semiconductor cleanrooms.
Using high-frequency ultrasonic vibration, the system dislodges fine particles from track surfaces without mechanical contact. Two independent negative-pressure channels collect detached particles in real time, helping reduce secondary contamination and track surface wear.
With its compact design and automated operation, the system can be integrated into existing OHT track systems, supporting continuous cleaning while reducing manual maintenance requirements.
| Item | Specification (VCT-3DP-F400) | Specification (VCT-3DP-F1000) |
| Model | VCT-3DP-F400 | VCT-3DP-F1000 |
| Power Supply (V/Hz) | 380 / 50 | 380 / 50 |
| Rated Power (kW) | 6 | 15 |
| Maximum Workpiece Size (mm) | ≤450 × 450 × 500 | ≤800 × 800 × 1200 |
| Maximum Load Capacity (kg) | 400 | 1000 |
| Dimensions (mm) | 2100 × 1400 × 2300 | 4700 × 3500 × 3600 |
| Compressed Air Pressure (MPa) | 0.5 – 0.8 | |
| Inert Gas Pressure (MPa) | 0.5 – 0.7 | |
| Inert Gas Flow Rate (L/min) | ≥200 | |
| Exhaust Filtration Level | H-class | |
| Applicable Powders | Nickel alloys, stainless steel, aluminum alloys, titanium alloys, and other metal powders | |
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