The Villo OHT Overhead Track Cleaning System is designed for continuous dust removal from overhead hoist transport (OHT) tracks in semiconductor cleanrooms.
Using high-frequency ultrasonic vibration, the system dislodges fine particles from track surfaces without mechanical contact. Two independent negative-pressure channels collect detached particles in real time, helping reduce secondary contamination and track surface wear.
With its compact design and automated operation, the system can be integrated into existing OHT track systems, supporting continuous cleaning while reducing manual maintenance requirements.
| Item | VJS-QB-055LNZ-N1R | VJS-QB-075LNZ-N1R | VJS-QB-110LNZ-N1R |
| Power Supply (V/Hz) | 380 / 50 | 380 / 50 | 380 / 50 |
| Rated Power (kW) | 5.5 | 7.5 | 11 |
| Maximum Airflow (m³/h) | 500 | 800 | 1050 |
| Maximum Vacuum (mbar) | 200 | 220 | 220 |
| Applicable Workpiece Size (mm) | 460 × 360 | 460 × 460 | 720 × 720 |
| Oxygen Concentration Environment (ppm) | ≤72 (under normal operating conditions) | ≤72 (under normal operating conditions) | ≤72 (under normal operating conditions) |
| Noise Level (dB(A)) | ≤72 | ≤72 | ≤72 |
| Primary Filtration | Front cyclone separator | Front cyclone separator | Front cyclone separator |
| Secondary Filtration | Permanent flame-retardant antistatic filter cartridge | Permanent flame-retardant antistatic filter cartridge | Permanent flame-retardant antistatic filter cartridge |
| Tertiary Filtration | H14 high-efficiency filter | H14 high-efficiency filter | H14 high-efficiency filter |
| Optional Configuration | Cooling & dehumidification unit, powder neutralization unit | Cooling & dehumidification unit, powder neutralization unit | Cooling & dehumidification unit, powder neutralization unit |
| Operating Pressure (Pa) | 200–5000 | 200–5000 | 200–5000 |
| Cleaning Time (min) | ≤60 | ≤60 | ≤60 |
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