The Villo OHT Overhead Track Cleaning System is designed for continuous dust removal from overhead hoist transport (OHT) tracks in semiconductor cleanrooms.
Using high-frequency ultrasonic vibration, the system dislodges fine particles from track surfaces without mechanical contact. Two independent negative-pressure channels collect detached particles in real time, helping reduce secondary contamination and track surface wear.
With its compact design and automated operation, the system can be integrated into existing OHT track systems, supporting continuous cleaning while reducing manual maintenance requirements.
| Module | External air circulation filtration module |
| Filtration Method | Permanent filter (>5 years) |
| Applicable Powders | High-temperature nickel alloys, aluminum alloys, titanium alloys, cobalt alloys, pure metal powders |
| Applicable Chamber Size (m) | ≤2000 |
| Filtration Efficiency | ≥0.3 µm, three-stage filtration, 99.99% |
| Filtration Stages (Optional) | ① Pre-filter |
| ② Permanent filter | |
| ③ High-efficiency filter | |
| Safety Functions (Optional) | ① Powder neutralization |
| ② Explosion venting device | |
| Module | Feeding / Sieving Module |
| Speed (L/min) | ≤3 |
| Vertical Height (m) | ≤8 |
| Horizontal Distance (m) | ≤25 |
| Operating Mode | Closed loop |
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